HFA-3
New standard of
Precision and quality
NHF-4
Normal evolution of the
standard model
HLA-3S
Back to basics of fabrication by
making visible and introducing
the fabrication chamber
HLB-series
High-speed/High-precision
Realization of compact form
for space-saving
HSA-3,4
Further evolved entry model
HFA-5
Pursuit of diversity of fabrication